Solutions » Introduction to Industry-Specific Solutions » Production Facility Piping Equipment for Facilities »
“Inert Gas”“ Clean Dry Air” Line
- Energy Saving
- By Industry ? Process
- Applications
Clean Gas Filter SF
Air Preparation Equipment ? Air Preparation FiltersClean Series/Low-Particle Generation ? Clean Gas Filters/Air Filters
-
?Cartridge type allows for element replacement
(SFA100/200/300, SFB100)
?Compact, disposable type for the semiconductor industry
(SFB300, SFC100)
Safety Instructions Air Preparation Equipment/Precautions Model Selection Guide/Quick Reference Guide Green Procurement (RoHS)
| Type | Series | Operating pressure | Filtration (μm) |
|---|---|---|---|
| Cartridge type disc | SFA100/200/300 | Max. 0.99 MPa （Vacuum: 1.3×10－6 kPa） | 0.01 (Filtration efficiency: 99.99%) |
| Cartridge type straight | SFB100 | Max. 0.99 MPa （Vacuum: 1.3×10－6 kPa） | 0.01 (Filtration efficiency: 99.99%) |
| Cartridge type straight | SFB200 | Max. 0.99 MPa （Vacuum: 1.3×10－6 kPa） | 120 |
| Disposable type straight | SFB300 | Max. 0.99 MPa （Vacuum: 1.3×10－6 kPa） | 0.01 (Filtration efficiency: 99.99%) |
| Disposable type multiple disc | SFC100 | Max. 0.99 MPa （Vacuum: 1.3×10－6 kPa） | 0.01 (Filtration efficiency: 99.99%) |
