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Air Management System
- Air Management System
Directional Control Valves
- Pilot Operated 4/5 Port Solenoid Valves
- Pilot Operated 3 Port Solenoid Valves
- Direct Operated 3/4/5 Port Solenoid Valves
- Reduced-wiring Fieldbus System (Serial Transmission System)
- Wireless System
- Air Operated Valves
- Mechanical Valves/Transmitters
- Finger Valve/Hand Valves/Residual Relief 3 Port Valve
- Blow Guns
- Power Valves
- ISO Valves
- Explosion-Proof Valves
Air Cylinders
- Standard Air Cylinders (Round Type）
- Standard Air Cylinders (Square Cover）
- Compact Air Cylinders
- Environment Resistant Cylinders
- Floating Joints/Rod End
- Air-hydro Units
- Mechanically Jointed Rodless Cylinders
- Magnetically Coupled Rodless Cylinders
- Table Cylinders
- Guide Cylinders
- Dual Rod Cylinders
- Lock Cylinders/Cylinder with An End Lock
- Fine Lock Cylinders
- Specialty Cylinders
- Clamp Cylinders
- Pin Shift Cylinder
- Stopper Cylinders
- Stroke Reading Cylinders
- Valve Mounted Air Cylinders
- ISO Cylinders: ISO Standards (6432)
- ISO Cylinders: ISO Standards (15552)
- ISO Cylinders: ISO Standards (21287)
- ISO Cylinders
- Shock Absorbers
- Auto Switches
- Wireless Auto Switches
- Actuator Position Sensor
- Flow Control Equipment
Rotary Actuators/Air Grippers
- Rotary Actuators Vane Type
- Rotary Actuators Rack & Pinion Type
- Parallel Type Air Grippers
- Angular Type Air Grippers
- Elastic Finger
- Magnet Grippers
- Air Gripper Unit for Collaborative Robots
- Auto Switches
- Position Sensor
Electric Actuators/Cylinders
- e-Actuator
- Manifold Controller/Manifold Controller Compatible Electric Actuator
- Battery-less Absolute Encoder Type
- Slider Type
- Rod Type/Guide Rod Type
- Slide Tables
- Miniature
- Rotary Tables
- Grippers
- Grippers for Collaborative Robots
- Controllers/Drivers
- Environment
- Motorless Type
- Electric Cylinders
- Card Motor
- Made to Order
Vacuum Equipment (Vacuum Generators/Vacuum Suction Cups/Other)
- Vacuum Ejectors (Vacuum Generators)/Vacuum Pump Systems
- Vacuum Ejectors
- Vacuum Gripper System (Foam Type)
- Vacuum Release Valve Units
- Air Suction Filters
- Vacuum Pads (Vacuum Suction Cups)
- Special Pads
- Gripper for Collaborative Robots
- Vacuum Saving Valves
- Magnet Buffer
- Vacuum Flow
- Vacuum Regulators
- Related Equipment for Vacuum Systems
Grippers for Collaborative Robots
- Electric Grippers
- Electric Vacuum Grippers (Built-in Vacuum Pump Type)
- Air Grippers
- Vacuum Grippers (Ejector Type)
- Magnet Grippers
- Elastic Finger
- Multi Hand Adapter
- Tool Changer
Compact Compressor
- Compact Compressor
Air Preparation Equipment
- Aftercoolers/Air Tanks
- Air Dryers
- Air Preparation Filters
- Auto Drains/Differential Pressure Gauges
Modular F.R.L./Pressure Control Equipment
- Modular F.R.L.
- Connectable Modular Components
- Regulators
- Electro-Pneumatic Regulators
- Proportional Control Valve
- Proportional Valves
- Booster Regulators
- Air Management System
Modular F.R.L. Units
- Modular F.R.L. Units/Air Combination
- Air Filters/Mist Separators/Micro Mist Separators
- Lubricators
- Modular Adapter
- Soft Start up Valves
- Pressure Relief 3 Port Valves
- Regulators
- Filter Regulators
- Modular Connection Compatible Devices
Pressure Control Equipment
- Regulators
- Electro-Pneumatic Regulators
- Proportional Valves
- Proportional Control Valve
- Air Management System
Booster Regulators
- Booster Regulators
Lubrication Equipment
- Lubrication Equipment
Fittings and Tubing
- Fittings for General Purposes
- Fittings for General Purposes(S Couplers/Multi-connectors)
- Fittings for Special Environments
- Fittings for Special Environments(Clean/Fluoropolymer)
- Tubing
- Tubing(Tubing for Special Environments)
- Tubing(Fluoropolymer/Clean)
- Related Products
Flow Control Equipment
- Speed Controllers for General Purposes
- Speed Controllers for Low Speed Control
- Speed Controllers Special Environments
- Speed Controllers with Special Functions
- Tool Operation Type Speed Controllers
- Air Saving Speed Controllers Air Saving Valves
- Related Equipment
Silencers/Exhaust Cleaners/Blow Guns/Pressure Gauges
- Silencers
- Exhaust Cleaners
- Blow Guns
- Pressure Gauges
Switches/Sensors/Controller
- Electronic Pressure Switches/Sensors (Self-contained Type)
- Electronic Pressure Switches/Sensors (Remote Type)
- Mechanical Pressure Switches
- Electronic Flow Switches/Sensors
- Clamp-on Type Flow Sensor
- Mechanical Flow Switches
- Air Management System
- Controllers
- Electronic Temperature & Humidity Switches
- Auto Switches for Air Cylinders
- Auto Switches for Rotary Actuators and Air Grippers
- Position Sensor
Static Neutralization Equipment
- Static Neutralization Equipment Ionizer Bar Type
- Static Neutralization Equipment Nozzle Type Ionizer
- Static Neutralization Equipment Fan Type Ionizer
- Static Neutralization Equipment Ionizer Gun
- Static Neutralization Equipment Desktop Duster Box
- Static Neutralization Equipment Electrostatic Sensor/Sensor Monitor/Meter
- Static Neutralization Equipment/Ionizers
Industrial Device Communication Equipment/Wireless System
- Wireless System: PROFINET Compatible Products
- Wireless System: EtherNet/IP Compatible Products
- Wireless System: EtherCAT Compatible Products
- Wireless System: IO-Link Compatible Products
- Wireless System: CC-Link Compatible Products
- Wireless System: DeviceNet Compatible Products
- Industrial Device Communication Equipment: PROFINET Compatible Products
- Industrial Device Communication Equipment: EtherNet/IP Compatible Products
- Industrial Device Communication Equipment: EtherCAT Compatible Products
- Industrial Device Communication Equipment: Modbus TCP Compatible Products
- Industrial Device Communication Equipment: ETHERNET POWERLINK Compatible Products
- Industrial Device Communication Equipment: CC-Link IE Field Compatible Products
- Industrial Device Communication Equipment: SSCNET III Compatible Products
- Industrial Device Communication Equipment: MECHATROLINK-Ⅲ Compatible Products
- Industrial Device Communication Equipment: PROFIsafe Compatible Products
- Industrial Device Communication Equipment: IO-Link Compatible Products
- Industrial Device Communication Equipment: PROFIBUS Compatible Products
- Industrial Device Communication Equipment: DeviceNet Compatible Products
- Industrial Device Communication Equipment: CC-Link Compatible Products
- Industrial Device Communication Equipment: AS-interface Compatible Products
- Industrial Device Communication Equipment: CompoNet Compatible Products
- Industrial Device Communication Equipment: Interbus Compatible Products
- Industrial Device Communication Equipment: MECHATROLINK-Ⅱ Compatible Products
- Other: RS232C Compatible Products
- Other: RS485 Compatible Products
Process Valves
- 2/3 Port Solenoid Valves/Air Operated Valves
- Compact 2/3 Port Solenoid Valves/Air Operated Valves
- Proportional Control Valve
- 5.0 MPa 2/3 Port Solenoid Valves
- 2/3 Port Valves for General Purpose Fluid Control
- Coolant Valves
- Valves for Water and Chemical Base Fluids
Chemical Liquid Valves/Fittings & Needle Valves/Tubing
- Chemical Liquid Valves
- Fittings/Needle Valves
- Tubing
Process Pumps(Diaphragm Pumps)
- Process Pumps
- Liquid Dispense Pump
Temperature Control Equipment
- Thermo-Chillers (Circulating Fluid Temperature Controllers) Standard Type/Basic Type
- Thermo-Chillers (Circulating Fluid Temperature Controllers) Inverter Type
- Thermo-Chillers (Circulating Fluid Temperature Controllers) Dual Channel Thermo chiller for Lasers
- Thermo-Chillers (Circulating Fluid Temperature Controllers) Rack Mount Type
- Thermo-Chillers (Circulating Fluid Temperature Controllers) High performance/Type & Inverter Type
- Chiller Compliant Regulations
- Thermo-cons/Thermoelectric Baths (Peltier-Type Temperature Control Equipment)
- Air Temperature Controllers
Process Gas Equipment　AP Tech
- Process Gas Equipment
High Vacuum Equipment
- High Vacuum Valves
- Other
- Slit Valves
- Rodless Cylinders for Vacuum
Industrial Filters/Sintered Metal Elements
- Industrial Filters
- Sintered Metal Elements
Pneumatic Instrumentation Equipment
- Positioners
- Regulators
- Relays/Valves
- Electro-Pneumatic Transducers
- Actuators
- Detection Conversion Units
- Solenoid Valves
- Piping Materials
Hydraulic Equipment
- Hydraulic Cylinders
- Hydraulic Equipment

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Slit Valve XGT

?This product is suitable to act as the partition valve between the load lock chamber and the transfer chamber or between the transfer chamber and the process chamber in semiconductor equipment or other equipment.

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Slit Valve XGT

Manual

Series View search result

XGT View search result

Series	View search result
XGT	View search result

Safety Instructions　System Configuration/Role of Each Line and Component　Series Variations　Glossary　Green Procurement (RoHS)

Series	Operating environmental pressure (Pa)(abs)	Fluid	Opening window size (Height x Width) (mm)	Operating pressure (MPa)(G)
XGT	Atmospheric pressure to 10^-6	Inert gas type vacuum	32 x 222 46 x 236 50 x 336	0.45 to 0.6

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Slit Valve XGT

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Slit Valve XGT

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