高真空閥
鋁制高真空L型閥 XLA/C/F/G
| 系列 | 操作方式 | 閥形式 | 軸密封 方式 | 用途 | 法蘭 尺寸 |
|---|---|---|---|---|---|
| XLA-2 | 氣控式 | 單作用 （N.C.） | 波紋管密封 | 無塵 清潔化 | 16～80 |
| XLAV-2（帶電磁閥） | 氣控式 | 單作用 （N.C.） | 波紋管密封 | 無塵 清潔化 | 16～80 |
| XLC-2 | 氣控式 | 雙作用 | 波紋管密封 | 無塵 清潔化 | 16～80 |
| XLF-2 | 氣控式 | 單作用 （N.C.） | O形圈密封 | 高速動(dòng)作 高動(dòng)作次數(shù) | 16～80 |
| XLFV-2（帶電磁閥） | 氣控式 | 單作用 （N.C.） | O形圈密封 | 高速動(dòng)作 高動(dòng)作次數(shù) | 16～80 |
| XLG-2 | 氣控式 | 雙作用 | O形圈密封 | 高速動(dòng)作 高動(dòng)作次數(shù) | 16～80 |
產(chǎn)品特點(diǎn)
Uniform baking temperature
Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve.
Lightweight, Compact
Large conductance, small body, excellent resistance against fluorine corrosion (body)
Low outgassing
Low outgassing makes it possible to use a lower capacity pump and also to shorten exhaust time.
Little heavy metal contamination
The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
(Bellows seal type)
Bellows assembly can be replaced which reduces maintenance costs and waste materials.
?Ambient temperature: Max. 150° C (Sensor)
?2-color indicator
For 100/120° C
