Product Information ?
WEB Catalog
IN_PROD_346
? Process Gas Equipment AP Tech
? Process Gas Equipment
WEB Catalog
Product List
- Air Management System
-
Directional Control Valves
- Pilot Operated 4/5 Port Solenoid Valves
- Pilot Operated 3 Port Solenoid Valves
- Direct Operated 3/4/5 Port Solenoid Valves
- Reduced-wiring Fieldbus System (Serial Transmission System)
- Wireless System
- Air Operated Valves
- Mechanical Valves/Transmitters
- Finger Valve/Hand Valves/Residual Relief 3 Port Valve
- Blow Guns
- Power Valves
- ISO Valves
- Explosion-Proof Valves
- Pilot Operated 4/5 Port Solenoid Valves
-
Air Cylinders
- Standard Air Cylinders (Round Type）
- Standard Air Cylinders (Square Cover）
- Compact Air Cylinders
- Environment Resistant Cylinders
- Floating Joints/Rod End
- Air-hydro Units
- Mechanically Jointed Rodless Cylinders
- Magnetically Coupled Rodless Cylinders
- Table Cylinders
- Guide Cylinders
- Dual Rod Cylinders
- Lock Cylinders/Cylinder with An End Lock
- Fine Lock Cylinders
- Specialty Cylinders
- Clamp Cylinders
- Pin Shift Cylinder
- Stopper Cylinders
- Stroke Reading Cylinders
- Valve Mounted Air Cylinders
- ISO Cylinders: ISO Standards (6432)
- ISO Cylinders: ISO Standards (15552)
- ISO Cylinders: ISO Standards (21287)
- ISO Cylinders
- Shock Absorbers
- Auto Switches
- Actuator Position Sensor
- Flow Control Equipment
- Standard Air Cylinders (Round Type）
- Rotary Actuators/Air Grippers
-
Electric Actuators/Cylinders
- e-Actuator
- Manifold Controller/Manifold Controller Compatible Electric Actuator
- Battery-less Absolute Encoder Type
- Slider Type
- Rod Type/Guide Rod Type
- Slide Tables
- Miniature
- Rotary Tables
- Grippers
- Grippers for Collaborative Robots
- Controllers/Drivers
- Environment
- Motorless Type
- Electric Cylinders
- Card Motor
- Made to Order
- e-Actuator
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Vacuum Equipment (Vacuum Generators/Vacuum Suction Cups/Other)
- Vacuum Ejectors (Vacuum Generators)/Vacuum Pump Systems
- Vacuum Ejectors
- Vacuum Gripper System (Foam Type)
- Vacuum Release Valve Units
- Air Suction Filters
- Vacuum Pads (Vacuum Suction Cups)
- Special Pads
- Gripper for Collaborative Robots
- Vacuum Saving Valves
- Magnet Buffer
- Vacuum Flow
- Vacuum Regulators
- Related Equipment for Vacuum Systems
- Vacuum Ejectors (Vacuum Generators)/Vacuum Pump Systems
- Grippers for Collaborative Robots
- Compact Compressor
- Air Preparation Equipment
- Modular F.R.L./Pressure Control Equipment
- Modular F.R.L. Units
- Pressure Control Equipment
- Booster Regulators
- Lubrication Equipment
- Fittings and Tubing
- Flow Control Equipment
- Silencers/Exhaust Cleaners/Blow Guns/Pressure Gauges
-
Switches/Sensors/Controller
- Electronic Pressure Switches/Sensors (Self-contained Type)
- Electronic Pressure Switches/Sensors (Remote Type)
- Mechanical Pressure Switches
- Electronic Flow Switches/Sensors
- Clamp-on Type Flow Sensor
- Mechanical Flow Switches
- Air Management System
- Controllers
- Electronic Temperature & Humidity Switches
- Auto Switches for Air Cylinders
- Auto Switches for Rotary Actuators and Air Grippers
- Position Sensor
- Electronic Pressure Switches/Sensors (Self-contained Type)
-
Static Neutralization Equipment
- Static Neutralization Equipment Ionizer Bar Type
- Static Neutralization Equipment Nozzle Type Ionizer
- Static Neutralization Equipment Fan Type Ionizer
- Static Neutralization Equipment Ionizer Gun
- Static Neutralization Equipment Desktop Duster Box
- Static Neutralization Equipment Electrostatic Sensor/Sensor Monitor/Meter
- Static Neutralization Equipment/Ionizers
- Static Neutralization Equipment Ionizer Bar Type
-
Industrial Device Communication Equipment/Wireless System
- Wireless System: PROFINET Compatible Products
- Wireless System: EtherNet/IP Compatible Products
- Wireless System: EtherCAT Compatible Products
- Wireless System: IO-Link Compatible Products
- Wireless System: CC-Link Compatible Products
- Wireless System: DeviceNet Compatible Products
- Industrial Device Communication Equipment: PROFINET Compatible Products
- Industrial Device Communication Equipment: EtherNet/IP Compatible Products
- Industrial Device Communication Equipment: EtherCAT Compatible Products
- Industrial Device Communication Equipment: Modbus TCP Compatible Products
- Industrial Device Communication Equipment: ETHERNET POWERLINK Compatible Products
- Industrial Device Communication Equipment: CC-Link IE Field Compatible Products
- Industrial Device Communication Equipment: SSCNET III Compatible Products
- Industrial Device Communication Equipment: MECHATROLINK-Ⅲ Compatible Products
- Industrial Device Communication Equipment: PROFIsafe Compatible Products
- Industrial Device Communication Equipment: IO-Link Compatible Products
- Industrial Device Communication Equipment: PROFIBUS Compatible Products
- Industrial Device Communication Equipment: DeviceNet Compatible Products
- Industrial Device Communication Equipment: CC-Link Compatible Products
- Industrial Device Communication Equipment: AS-interface Compatible Products
- Industrial Device Communication Equipment: CompoNet Compatible Products
- Industrial Device Communication Equipment: Interbus Compatible Products
- Industrial Device Communication Equipment: MECHATROLINK-Ⅱ Compatible Products
- Other: RS232C Compatible Products
- Other: RS485 Compatible Products
- Wireless System: PROFINET Compatible Products
- Process Valves
- Chemical Liquid Valves/Fittings & Needle Valves/Tubing
- Process Pumps(Diaphragm Pumps)
-
Temperature Control Equipment
- Thermo-Chillers (Circulating Fluid Temperature Controllers) Standard Type/Basic Type
- Thermo-Chillers (Circulating Fluid Temperature Controllers) Inverter Type
- Thermo-Chillers (Circulating Fluid Temperature Controllers) Dual Channel Thermo chiller for Lasers
- Thermo-Chillers (Circulating Fluid Temperature Controllers) Rack Mount Type
- Thermo-Chillers (Circulating Fluid Temperature Controllers) High performance/Type & Inverter Type
- Chiller Compliant Regulations
- Thermo-cons/Thermoelectric Baths (Peltier-Type Temperature Control Equipment)
- Air Temperature Controllers
- Thermo-Chillers (Circulating Fluid Temperature Controllers) Standard Type/Basic Type
- Process Gas Equipment AP Tech
- High Vacuum Equipment
- Industrial Filters/Sintered Metal Elements
- Pneumatic Instrumentation Equipment
- Hydraulic Equipment
Theme
-
Clean Series/Low-Particle Generation
- Directional Control Valves
- Air Cylinders
- Rotary Actuators
- Air Grippers
- Air Dryers
- Compressed Air Cleaning Filter Series
- Clean Gas Filters/Air Filters
- Exhaust Cleaner for Clean Room/Clean Exhaust Filter
- Modular F.R./Pressure Control Equipment
- Fittings
- Tubing
- Flow Control Equipment
- Switches/Sensors
- Flow Switch
- Electric Actuators
- Directional Control Valves
- Fluoropolymer Equipment/PVC Equipment
-
Series Compatible with Secondary Batteries Series 25A-
- Air Management System
- Directional Control Valves
- Actuators
- Related Products
- Rotary Actuators/Air Grippers
- Vacuum Equipment
- Air Preparation Equipment/Clean Air Filters
- ModularF.R.L./Pressure Control Equipment
- Flow Control Equipment/Fittings
- Tubings
- Detection Switches/Auto Switches
- Process Valves
- Process Gas Equipment
- Electric Actuators
- Air Management System
- Copper, Fluorine-free Equipment Series 20-
- ISO Products
- Arc Welding Process Equipment
- IO-Link Compatible Products
- Grease-free Nitrogen (N2) Compatible Equipment
- List of ATEX Compliant Products
- Explosion-Proof Valves Certified Products
- Equipment for the Food Manufacturing Industry
Process Gas Equipment
List
PictureRegulators for Ultra High Purity (UHP) AP/SL/AP/AZ
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?For UHP gas delivery in semiconductor and other clean industries
?Body material: 316L SS secondary remelt or 316L SS
?Electropolished wetted parts
?External metal seal construction
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2D/3D CAD
The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.
Click here for 2D/3D CAD Regulators for Ultra High Purity (UHP) AP/SL/AP/AZ
Manual
Series Type View search result AP Single Stage Regulator View search result AP Two Stage Regulator View search result AP Pneumatic Actuation Pressure Regulator View search result SL Single Stage Regulator View search result AZ Single Stage Regulator View search result AZ Pneumatic Actuation Pressure Regulator View search result AK Single Stage Regulator View search result AK Two Stage Regulator View search result AK Pneumatic Actuation Pressure Regulator View search result BP Back Pressure Regulator View search result BP Back Pressure Regulator View search result
Safety Instructions Process Gas Equipment/Common Precautions Series Variations Valve and Regulator Recommendations Technical Data/Glossary of Terms Green Procurement (RoHS)
| Series | Description | Type | Body material |
|---|---|---|---|
| AP | For Ultra High Purity | Single Stage Regulator | 316L SS secondary remelt |
| AP | For Ultra High Purity | Two Stage Regulator | 316L SS secondary remelt |
| AP | For Ultra High Purity | Pneumatic Actuation Pressure Regulator | 316L SS secondary remelt |
| SL | For Ultra High Purity | Single Stage Regulator | 316L SS secondary remelt |
| AZ | For Ultra High Purity | Single Stage Regulator | SUS316L |
| AZ | For Ultra High Purity | Pneumatic Actuation Pressure Regulator | SUS316L |
| AK | For General Applications | Single Stage Regulator | SUS316 |
| AK | For General Applications | Two Stage Regulator | SUS316 |
| AK | For General Applications | Pneumatic Actuation Pressure Regulator | SUS316 |
| BP | For Ultra High Purity | Back Pressure Regulator | SUS316 |
| BP | For General Applications· | Back Pressure Regulator | SUS316 |
Diaphragm Valve for Ultra High Purity AP
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?For UHP gas delivery in semiconductor and other clean industries
?Used as a gas shutoff valve
?No spring is used for the wetted parts and the drive part is also separated from the diaphragm. Dead space in the flow path is small in order to suppress particle generation.
Diaphragm Valve for Ultra High Purity AP
Manual
Series Type View search result AP Air Operated Type Diaphragm Valve View search result AP Manually Operated Type Diaphragm Valve View search result AP Metering Valve View search result AZ Air Operated Type Diaphragm Valve View search result AZ Manually Operated Type Diaphragm Valve View search result AZ Metering Valve View search result AK Air Operated Type Diaphragm Valve View search result AK Manually Operated Type Diaphragm Valve View search result AK Metering Valve View search result
Safety Instructions Process Gas Equipment/Common Precautions Series Variations Valve and Regulator Recommendations Technical Data/Glossary of Terms Green Procurement (RoHS)
| Series | Description | Type | Body material |
|---|---|---|---|
| AP | For Ultra High Purity | Air Operated Type Diaphragm Valve | 316L SS secondary remelt |
| AP | For Ultra High Purity | Manually Operated Type Diaphragm Valve | 316L SS secondary remelt |
| AP | For Ultra High Purity | Metering Valve | 316L SS secondary remelt |
| AZ | For Ultra High Purity | Air Operated Type Diaphragm Valve | SUS316L |
| AZ | For Ultra High Purity | Manually Operated Type Diaphragm Valve | SUS316L |
| AZ | For Ultra High Purity | Metering Valve | SUS316L |
| AK | For General Applications | Air Operated Type Diaphragm Valve | SUS316 |
| AK | For General Applications | Manually Operated Type Diaphragm Valve | SUS316 |
| AK | For General Applications | Metering Valve | SUS316 |
Check Valve/Vacuum Generator/Flow Switch AP
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[Check valve]
?Fluid backflow is prevented by back pressure.
?Unique design with only one moving part in the gas stream, an O-ring
?Springless structure suppresses particle generation by vibration or chattering and pressure fluctuations on the downstream side
[Vacuum generator]
?Vacuum generation equipment
?Applicable to the exhaustion of unnecessary gas remaining inside the piping during gas cylinder replacement
[Flow switch]
?Detects excess flow above a given flow rate caused by pipe breakage, etc.
Check Valve/Vacuum Generator/Flow Switch AP
Manual
Series Type View search result AP Check Valve View search result AP Vacuum Generators View search result AP Flow Switches View search result
Safety Instructions Process Gas Equipment/Common Precautions Series Variations Valve and Regulator Recommendations Technical Data/Glossary of Terms Green Procurement (RoHS)
| Series | Type | Body material |
|---|---|---|
| AP | Check Valve | 316L SS secondary remelt |
| AP | Vacuum Generators | 316L SS secondary remelt |
| AP | Flow Switches | 316L SS secondary remelt |
