Product Information ?
WEB Catalog
IN_PROD_346
? Industrial Device Communication Equipment/Wireless System
? Industrial Device Communication Equipment: DeviceNet Compatible Products
Industrial Device Communication Equipment: DeviceNet Compatible Products
Serial Transmission System EX260
-
For Output
?The applicable protocols differ depending on the series.
For details, refer to the catalog of each series.
?IP67
?RJ45 communication connectors (X205)
?Related Products
?IO-Link Master
Safety Instructions 3/4/5 Port Solenoid Valves/Precautions Fieldbus System Precautions
Industrial IoT Cybersecurity Glossary of Fieldbus Terms Series Variations/Applicable Valve Series Safety over Fieldbus with PROFIsafe Green Procurement (RoHS) IO-Link Master
Industrial IoT Cybersecurity Glossary of Fieldbus Terms Series Variations/Applicable Valve Series Safety over Fieldbus with PROFIsafe Green Procurement (RoHS) IO-Link Master
Series | Enclosure | Communication protocol? | Applicable valve |
---|---|---|---|
EX260 | IP67 | DeviceNet? PROFIBUS DP CC-Link EtherCAT PROFINET EtherNet/IP? Ethernet POWERLINK IO-Link (Only available for SY, JSY, VQC communication connectors) PROFIsafe (Only available for SY, JSY, VQC communication connectors) | SY3000,5000,7000 (Plug-in) JSY1000,3000,5000 (Plug-in) VQC1000,2000,4000,5000 SV1000,2000,3000 S0700(IP40) |
Serial Transmission System EX120/121/122/124/126/140/180
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For Output
?The applicable protocols differ depending on the series.
For details, refer to the catalog of each series.
Safety Instructions 3/4/5 Port Solenoid Valves/Precautions Fieldbus System Precautions
Industrial IoT Cybersecurity Glossary of Fieldbus Terms Series Variations/Applicable Valve Series
Green Procurement (RoHS)
Industrial IoT Cybersecurity Glossary of Fieldbus Terms Series Variations/Applicable Valve Series
Green Procurement (RoHS)
Series | Enclosure | Communication protocol? | Applicable valve |
---|---|---|---|
EX120 | IP20 | DeviceNet? CC-Link CompoNet? | JSY1000, 3000, 5000 (Plug-in) SY3000,5000,7000 (Plug-in) VQ1000,2000 SV1000,2000,3000,4000 |
EX121 | IP20 | DeviceNet? CC-Link CompoNet? | SY3000,5000 |
EX122 | IP20 | DeviceNet? CC-Link CompoNet? | SY3000,5000 |
EX124 | IP65 | CC-Link DeviceNet? | VQ2000,4000,5000 |
EX126 | IP67 | CC-Link | SY3000,5000,7000 (Plug-in) SV1000,2000,3000 VQC1000,2000,4000, 5000 |
EX140 | IP20 | DeviceNet? CC-Link | SZ3000 SQ1000,2000 |
EX180 | IP20 | DeviceNet? CC-Link AnyWireASLINK (Made to order) | SY3000,5000,7000 SJ2000,3000 S0700 |
Serial Transmission System EX600
-
For Input/Output
?The applicable protocols differ depending on the series.
For details, refer to the catalog of each series.
?IO-Link Devices
? The EX600-SPN1/SPN2 series will be discontinued in October 2023.
Please select the EX600-SPN3/SPN4 series.
Safety Instructions 3/4/5 Port Solenoid Valves/Precautions Fieldbus System Precautions
Industrial IoT Cybersecurity Glossary of Fieldbus Terms Series Variations/Applicable Valve Series
Green Procurement (RoHS)
Industrial IoT Cybersecurity Glossary of Fieldbus Terms Series Variations/Applicable Valve Series
Green Procurement (RoHS)
Series | Enclosure | Communication protocol? | Applicable valve |
---|---|---|---|
EX600 | IP67 | PROFIBUS DP DeviceNet? CC-Link EtherNet/IP? EtherNet/IP? (IO-Link unit compatible) EtherCAT EtherCAT (IO-Link unit compatible) PROFINET PROFINET (IO-Link unit compatible) MRP (PROFINET) (Made to order) Ethernet POWERLINK (Made to order) Modbus TCP (Made to order) CC-Link IE Field (Made to order) EtherNet/IP? (IO-Link master compatible) (Made to order) | SY3000,5000,7000 (Plug-in) JSY1000, 3000, 5000 SV1000,2000,3000 VQC1000,2000,4000,5000 S0700(IP40) |
Serial Transmission System EX500
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For Input/Output, Gateway Type
?The applicable protocols differ depending on the series.
For details, refer to the catalog of each series.
*The EX500 series is to be discontinued. When designing new equipment
and facilities, consider using another series (EX260/EX600) instead.
Safety Instructions 3/4/5 Port Solenoid Valves/Precautions Fieldbus System Precautions
Industrial IoT Cybersecurity Glossary of Fieldbus Terms Series Variations/Applicable Valve Series
Green Procurement (RoHS)
Industrial IoT Cybersecurity Glossary of Fieldbus Terms Series Variations/Applicable Valve Series
Green Procurement (RoHS)
Series | Enclosure | Communication protocol? | Applicable valve |
---|---|---|---|
EX500 | IP67 | EtherNet/IP? PROFINET | SY3000,5000,7000 (Plug-in) VQC1000,2000,4000,5000 SV1000,2000,3000 S0700(IP40) |
Serial Transmission System EX510
-
For Input/Output, Gateway Type
?The applicable protocols differ depending on the series.
For details, refer to the catalog of each series.
*The EX510 series is to be discontinued. When designing new equipment
and facilities, consider using another series (EX260/EX600) instead.
Safety Instructions 3/4/5 Port Solenoid Valves/Precautions Fieldbus System Precautions
Industrial IoT Cybersecurity Glossary of Fieldbus Terms Series Variations/Applicable Valve Series
Green Procurement (RoHS)
Industrial IoT Cybersecurity Glossary of Fieldbus Terms Series Variations/Applicable Valve Series
Green Procurement (RoHS)
Series | Enclosure | Communication protocol? | Applicable valve |
---|---|---|---|
EX510 | IP20 | CC-Link DeviceNet? PROFIBUS DP EtherNet/IP? (Made to order) PROFINET (Made to order) | SJ2000,3000 SY3000,5000,7000 (Plug-in) SY3000,5000,7000,9000 SYJ3000,5000,7000 SQ1000,2000 SZ3000 VQ1000,2000 VQZ1000,2000,3000 S0700 |
Serial Transmission System EX250
-
For Input/Output
?The applicable protocols differ depending on the series.
For details, refer to the catalog of each series.
*The EX250 series is to be discontinued. When designing new equipment
and facilities, consider using another series (EX260/EX600) instead.
Safety Instructions 3/4/5 Port Solenoid Valves/Precautions Fieldbus System Precautions
Industrial IoT Cybersecurity Glossary of Fieldbus Terms Series Variations/Applicable Valve Series
Green Procurement (RoHS)
Industrial IoT Cybersecurity Glossary of Fieldbus Terms Series Variations/Applicable Valve Series
Green Procurement (RoHS)
Series | Enclosure | Communication protocol? | Applicable valve |
---|---|---|---|
EX250 | IP67 | DeviceNet? CC-Link AS-Interface EtherNet/IP? | JSY1000, 3000, 5000 (Plug-in) SY3000,5000,7000 (Plug-in) VQC1000,2000,4000,5000 SV1000,2000,3000 S0700(IP40) |
Step Motor Controller JXCE1/91/P1/D1/L□/M1
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?EtherCAT, EtherNet/IP?, PROFINET, DeviceNet?,
IO-Link, and CC-Link compatible
?Two types of operation command:
Step no. defined operation, Numerical data defined operation
?Transition wiring of communication cables
?Numerical monitoring available
?IO-Link communication can be performed.
?Controller with STO sub-function/JXC□F
Safety Instructions Electric Actuators/Precautions Features Series Variations
Simplified Selection Flow Chart Green Procurement (RoHS) CE/UL-compliance List
Simplified Selection Flow Chart Green Procurement (RoHS) CE/UL-compliance List
Series | Compatible motor | Power supply voltage | Fieldbus |
---|---|---|---|
JXCE1 (Standard) JXCEF (With subfunction) | Step motor (Servo/24 VDC) | 24 VDC ±10% | EtherCAT? |
JXC91 (Standard) JXC9F (With subfunction) | Step motor (Servo/24 VDC) | 24 VDC ±10% | EtherNet/IP? |
JXCP1 (Standard) JXCPF (With subfunction) | Step motor (Servo/24 VDC) | 24 VDC ±10% | PROFINET |
JXCD1 (Standard) | Step motor (Servo/24 VDC) | 24 VDC ±10% | DeviceNet? |
JXCL1 (Standard) JXCLF (With subfunction) | Step motor (Servo/24 VDC) | 24 VDC ±10% | IO-Link |
JXCM1 (Standard) | Step motor (Servo/24 VDC) | 24 VDC ±10% | CC-Link |
Fieldbus-compatible Gateway (GW) Unit LEC-G
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?The LE□ series electric actuators are applicable to Fieldbus protocols.
?Conversion unit for Fieldbus network and LEC serial communication
?2 methods of operation:
Step data input, numerical data input
?Position, speed, and other values can be checked on the PLC.
Safety Instructions Electric Actuators/Precautions Features
Series Variations Simplified Selection Flow Chart Wiring Method
Green Procurement (RoHS) CE/UL-compliance List
Series Variations Simplified Selection Flow Chart Wiring Method
Green Procurement (RoHS) CE/UL-compliance List
Series | Applicable fieldbus | Power supply voltage | Applicable controllers |
---|---|---|---|
LEC-G | CC-Link DeviceNet? PROFIBUS DP EtherNet/IP? | 24 VDC ±10% | LECA6 series |
Electro-Pneumatic Regulator ITV
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?Stepless control of air pressure in proportion to electrical signals
?Sensitivity: 0.2 kPa (100 kPa specification)
?Linearity: ±1% or less (F.S.)
?Hysteresis: 0.5% or less (F.S.)
?Communication: CC-Link, DeviceNet?, PROFIBUS DP, RS-232C, IO-Link
?IO-Link Master
Safety Instructions F.R.L. Units/Precautions Series Variations/Pressure Control Equipment
Green Procurement (RoHS) IO-Link Master Electro-Pneumatic Regulator Application Examples
Green Procurement (RoHS) IO-Link Master Electro-Pneumatic Regulator Application Examples
Series | Port size | Set pressure (MPa) |
---|---|---|
ITV0000 | Built-in One-touch fitting φ4,φ5/32 | 0.001 to 0.1 0.001 to 0.5 0.001 to 0.9 |
ITV1000 | 1/8,1/4 | 0.005 to 0.1 0.005 to 0.5 0.005 to 0.9 |
ITV2000 | 1/4,3/8 | 0.005 to 0.1 0.005 to 0.5 0.005 to 0.9 |
ITV3000 | 1/4,3/8,1/2 | 0.005 to 0.1 0.005 to 0.5 0.005 to 0.9 |
Electronic Vacuum Regulator ITV
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?Stepless control of vacuum pressure in proportion to electrical signals
?Communication: CC-Link, DeviceNet?, PROFIBUS DP, RS-232C
Safety Instructions F.R.L. Units/Precautions Series Variations/Pressure Control Equipment Green Procurement (RoHS)
Series | Port size | Set pressure (MPa) |
---|---|---|
ITV009□ | Built-in One-touch fitting φ4,φ5/32 | -1 to -100 |
ITV209□ | 1/4 | -1.3 to -80 |
Thermo-chiller/High-performance Type HRZ
This product can only be shipped to China, Taiwan, Korea, Singapore,Malaysia, and Japan. For use in regions other than the aforementioned, order the HRZ-F.
-
?Suitable for semiconductor processing equipment with a wide variety of
features, such as high-temperature stability, a wide temperature range,
failure diagnosis, external communication, etc.
?Compliant with various safety standards
?Compliant with UL Standards, SEMI Standards, CE-marking
Safety Instructions Temperature Control Equipment/Precautions Features/Series Variations
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
---|---|---|---|---|---|
HRZ | -20 to 40℃ 20 to 90℃ -20 to 90℃ | 1 kW, 2 kW, 4 kW, 8 kW | ±0.1℃ | Water-cooled refrigeration | Fluorinated fluids/Ethylene glycol aqueous solution (60%)/Tap water, Deionized water |
Water-cooled Thermo-chiller/High-performance Type HRW
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?Direct heat exchanger for in-plant circulating fluid
?Can control the temperature over a wide range since a compressor is not required.
?Suitable for semiconductor processing equipment with a wide variety of features, such as high-temperature stability, a wide temperature range, failure diagnosis, external communication, etc.
?Compliant with UL Standards, SEMI Standards, CE-marking
?It is possible to select the inverter type.
Safety Instructions Temperature Control Equipment/Precautions Features/Series Variations
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
---|---|---|---|---|---|
HRW | 20 to 90℃ | 2 kW, 8 kW, 15 kW, 30 kW | ±0.3℃ | Water-cooled type (Without compressor) | Fluorinated, Tap water, Deionized water, Ethylene glycol aqueous solution (60%) |
Non F-Gas (CO2 Refrigerant) Refrigerated Thermo-chiller HRZC
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?Non F-Gas
?Uses a CO2 refrigerant
?Greatly reduced GWP
?GWP = 1 Compliant with each country’s refrigerant regulations
EU refrigerant regulations: GWP150 or more
US refrigerant regulations: GWP700 or more
California, US refrigerant regulations: GWP750 or more
? “GWP” indicates the global warming potential. The values are based on
the IPCC AR4.
?Air transport possible
?Eliminates the need to pay for F-Gas recovery & disposal
?Eliminates the need for periodic inspections based on the Fluorocarbon
Emissions Control Act (Japan)
Safety Instructions Temperature Control Equipment/Precautions Features/Series Variations
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
---|---|---|---|---|---|
HRZC | ?20 to 90℃ | 10 kW | ±0.1℃ | Water-cooled refrigeration | Fluorinated fluids 60% ethylene glycol aqueous solution Deionized water/Tap water |
Thermo-chillers for the Semiconductor Industry INR-495-042/INR-495-043
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?Non F-Gas (CO2 refrigerant)
?GWP: 1 (Natural refrigerant)
?EU refrigerant regulations: GWP150 or less?
?US refrigerant regulations: GWP700 or less?
?California, US refrigerant regulations: GWP750 or less
?As of December 2023
?Air transport possible
No air transport restrictions for non-toxic and non-flammable?
refrigerants
?A1 (ASHRAE34 standard)
?No F-Gas management required
Eliminates the need for periodic inspections based on the Fluorocarbon
Emissions Control Act (Japan)
?No F-Gas recovery & disposal costs
Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
---|---|---|---|---|---|
INR-495-042 INR-495-043 | -20 to 70 | 8.5 kW | ±1.0℃ | Water-cooled refrigeration | Fluorinated fluid |